Deposition of thin films by sputtering method - SlideServe
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Deposition of thin films by sputtering method - SlideServe
Student Presentation of FYS-9310 Material Science of Semiconductor. Deposition of thin films by sputtering method. Feri Adriyanto. PhD student Microsystems and Nanotechnology Laboratory Department of Physics, University of Oslo. Outline. Introduction. Fundamental of sputtering.
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